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Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (NANO- AND MICROSCIENCE, ENGINEERING, TECHNOLOGY, AND MEDICINE SERIES)

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Title: Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (NANO- AND MICROSCIENCE, ENGINEERING, TECHNOLOGY, AND MEDICINE SERIES)
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